Clean the MAF:
1. A MAF has two air tunnels on it, so you have to clean both of them.
( red arrows show how air flows through the MAF)

2. Take you MAF cleaner and put the pipe on it, so you can reach small areas. When you clean the MAF, DO NOT touch anything in side the tunnel with the pipe because that can damage the sensor.

3. Keep blowing the cleaner for 2-3 seconds to each tunnel, and you can also clean the resistor at the same time. After cleaning the MAF, let it sit for 15 minutes to dry. I prefer to put it like this, so dust won't get in.
Reinstall:
When you put the MAF back, just make sure the air flow direction is correct, with two tunnels/holes facing to the air filter.
Relearn procedure:
After putting the MAF back to the car, perform the ECU reset and Idle relearn procedures.